High-Pressure High-Purity Gas Filter: Definition, Working Principle, Applications & Advantages
1. What is a High-Pressure Filter?
High-Pressure High-Purity Gas Filters are most commonly used in hydraulic systems. Designed to withstand the maximum pressure output by the system, they are sized according to the system's flow rate. These filters protect sensitive components operating downstream of the filter. While positioned upstream of these components, they are installed downstream of the system's pump.
2. Working Principle of High-Pressure Filters
A High-Pressure Filter operates when fluid is pushed into the filter's inlet, allowing the filter to trap contaminants and remove them from the system. The working principle is mainly based on the pore structure of the filter media and pressure difference control. Its core components include filter elements, filter plates, or filter bags—filter media with specific pore sizes and materials that block impurity particles in the fluid from passing through.
2.1 Selection and Structure of Filter Media
Diverse Materials: High-Pressure Filter media are available in various materials such as high-strength aluminum alloy and stainless steel, adapting to different pressure levels and medium properties.
Filtration Precision: The pore size of the filter element determines its filtration accuracy, typically reaching above 0.1 microns, which effectively intercepts tiny particles and suspended solids in the fluid.
2.2 Pressure Difference Principle
When fluid enters the High-Pressure Filter, the filter media blocks its flow, causing the fluid velocity to gradually decrease on the media surface and form a filter cake.
This filter cake further hinders fluid passage, creating a pressure difference between the inlet and outlet.
High-Pressure Filters precisely control this pressure difference to ensure fluid flows through the media at a stable rate, achieving continuous and efficient filtration.
2.3 Self-Cleaning Mechanism
To extend the service life of the filter media and maintain filtration efficiency, High-Pressure Filters are usually equipped with a self-cleaning function. This function cleans the filter cake and accumulated impurities from the media surface by reversing fluid flow or generating vortex flow, keeping the media unobstructed.
3. Applications of High-Pressure Filters
Compared with other filters, High-Pressure Filters are best suited for filtering solids under high pressure. Their primary purpose is to protect downstream components and instruments from contamination. It is important to note that every system has a recommended cleanliness target, as some contamination is unavoidable. Installing a High-Pressure High-Purity Gas Filter in your system is crucial to prevent catastrophic failure of components across all applications.
4. Key Functions of High-Pressure Filters
4.1 Precise Impurity Interception
High-Pressure Filters efficiently remove various impurities from compressed air, including dust, rust, oil mist, and hydrocarbons. In semiconductor manufacturing processes:
Dust particles can cause circuit defects during critical steps like lithography.
Rust introduces metal ion contamination, affecting the electrical performance of semiconductors.
Oil mist and hydrocarbons may undergo chemical reactions at high temperatures, damaging the chip surface.
With their precision filtration structure and high-quality filter materials, these filters accurately trap potential pollution sources, ensuring the gas delivered to the production process meets extremely high purity standards and effectively improving the quality and performance stability of semiconductor products.
4.2 Enhanced Gas Quality Indicators
By removing impurities, the filter significantly improves gas quality indicators such as particle count, moisture content, and oil content. Pure gas helps:
Increase the efficiency of chemical reactions and uniformity of physical deposition in semiconductor manufacturing.
Reduce process deviations and defects caused by gas impurities.
Improve chip yield and production efficiency, lower production costs, and enhance enterprise competitiveness in the market—providing strong support for the high-quality development of the semiconductor industry.
5. Easy Maintenance Reduces Operating Costs
The replaceable filter element design is a major advantage of High-Pressure Filters. As usage time increases, the filtration efficiency of the filter element gradually decreases, requiring timely replacement to maintain optimal filter performance. The filter elements of Hengge Filters (note: brand name retained as provided; adjust if official English name exists) feature easy and straightforward replacement—no complex tools or professional technicians are needed. Operators can quickly complete the replacement process, restoring the filter to efficient operation in a short time. This convenient maintenance method not only shortens equipment downtime and reduces production losses caused by equipment failures or delayed maintenance but also lowers maintenance and labor costs, improving enterprise operational efficiency. It provides a cost-effective solution for the long-term stable development of semiconductor enterprises.
